The actuator of the XAAR 5601 GS3 printhead is based on thin film PZT deposited by the sol-gel technique. To meet the required printhead performance, the PZT should be as good as or better than the best-known sputtered PNZT films. This objective was achieved through a systematic investigation of sol-gel PZT films including the effect on all critical PZT properties of pyrolysis and crystallization conditions, lead excess, the nature of dopants and their concentration and distribution. The outcome is presented in this paper.
Peter Mardilovich, Charalampos Fragkiadakis, Song Won Ko, Mani Sivaramakrishnan, "A New Standard for Thin Film Actuators with Sol-gel PZT" in Proc. IS&T Printing for Fabrication: Int'l Conf. on Digital Printing Technologies (NIP33), 2017, pp 133 - 135, https://doi.org/10.2352/ISSN.2169-4451.2017.33.133