A method that enables the measurement of an electrostatic latent image equipped with a laser scanning unit is proposed. One of the features of this method is that the laser scanning unit is arranged outside the vacuum chamber. The vibration and the electromagnetic field interference of a polygon motor do not affect the orbit of the electron beam because the polygon motor is kept away from the electron optics system. A pair of laser diodes (LDs) is used as the light source of the laser scanning unit. The measurement results obtained by the proposed method provide valuable new information on latent image characteristics for exposure conditions.
Hiroyuki Suhara, Masato Iio, Hiroto Tachibana, "Latent Image Measurement for Dot Pattern Formed by Scanning Laser Beam" in Proc. IS&T Int'l Conf. on Digital Printing Technologies and Digital Fabrication (NIP30), 2014, pp 264 - 267, https://doi.org/10.2352/ISSN.2169-4451.2014.30.1.art00064_1