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Volume: 28 | Article ID: art00044_1
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Direct Etch through SiNx, Selective Dope, and Seed Layer Dispense with Inert Piezoelectric Inkjet Print Head for Solar Cell Fabrication
  DOI :  10.2352/ISSN.2169-4451.2012.28.1.art00044_1  Published OnlineJanuary 2012
Abstract

The solar photovoltaic industry is driven towards increasing cell efficiency while reducing cost. Ink jet process offers an attractive, non-contact method enabling reduced capital equipment cost, fewer process steps and higher throughput. This study focuses on inkjet processes development of directly etching through a Silicon Nitride layer (anti-reflection layer), selectively doping and precisely dispensing a seed layer, also their combination at a shot to prepare for conventional screen printing afterwards or for low cost electroplating for the “selectiveemitter” solar cell fabrication.

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Ty Chen, "Direct Etch through SiNx, Selective Dope, and Seed Layer Dispense with Inert Piezoelectric Inkjet Print Head for Solar Cell Fabricationin Proc. IS&T Int'l Conf. on Digital Printing Technologies and Digital Fabrication (NIP28),  2012,  pp 148 - 150,  https://doi.org/10.2352/ISSN.2169-4451.2012.28.1.art00044_1

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