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<article article-type="research-article">
  <front>
    <journal-meta>
      <journal-id journal-id-type="aggregator">72010410</journal-id>
      <journal-title>NIP &amp; Digital Fabrication Conference</journal-title>
      <abbrev-journal-title>nip digi fabric conf</abbrev-journal-title>
      <issn pub-type="ppub">2169-4451</issn><issn pub-type="epub"/>
      <publisher>
        <publisher-name>Society of Imaging Science and Technology</publisher-name>
        <publisher-loc>7003 Kilworth Lane, Springfield, VA 22151, USA</publisher-loc>
      </publisher>
    </journal-meta>
    <article-meta><article-id pub-id-type="doi">10.2352/ISSN.2169-4451.2012.28.1.art00044_1</article-id>
      <article-id pub-id-type="sici">2169-4451(20120101)2012:1L.148;1-</article-id>
      <article-id pub-id-type="publisher-id">nip_v2012n1/splitsection44.xml</article-id>
      <article-id pub-id-type="other">/ist/nipdf/2012/00002012/00000001/art00044</article-id>
      <article-categories>
        <subj-group>
          <subject>Articles</subject>
        </subj-group>
      </article-categories>
      <title-group>
        <article-title>Direct Etch through SiNx, Selective Dope, and Seed Layer Dispense with Inert Piezoelectric Inkjet Print Head for Solar Cell Fabrication</article-title>
      </title-group>
      <contrib-group>
        <contrib>
          <name>
            <surname>Chen</surname>
            <given-names>Ty</given-names>
          </name>
        </contrib>
      </contrib-group>
      <pub-date>
        <day>01</day>
        <month>01</month>
        <year>2012</year>
      </pub-date>
      <volume>2012</volume>
      <issue>1</issue>
      <fpage>148</fpage>
      <lpage>150</lpage>
      <permissions>
        <copyright-year>2012</copyright-year>
      </permissions>
      <abstract>
        <p>The solar photovoltaic industry is driven towards increasing cell efficiency while reducing cost. Ink jet process offers an attractive, non-contact method enabling reduced capital equipment cost, fewer process steps and higher throughput. This study focuses on inkjet processes development
 of directly etching through a Silicon Nitride layer (anti-reflection layer), selectively doping and precisely dispensing a seed layer, also their combination at a shot to prepare for conventional screen printing afterwards or for low cost electroplating for the &#x201C;selectiveemitter&#x201D;
 solar cell fabrication.</p>
      </abstract>
    </article-meta>
  </front>
</article>
