A novel approach to form a 3 dimensional microfluidic device is demonstrated by the use of a customized negative dryfilm photoresist. The formation of the microfluidic chambers utilizes a lamination process, which enables the tenting of a negative photoresist onto the thickfilm barrier layer. Specifically in this paper, we will discuss the influences of the dryfilm photoresist components and how they relate to thermo-mechanical and adhesive properties required to form a microfluidic chamber.
Sean T. Weaver, Melanie Mathis, Eric Hall, Paul Dryer, "Advances in Dryfilm Photoresist for Microfluidic Device Applications" in Proc. IS&T Int'l Conf. on Digital Printing Technologies and Digital Fabrication (NIP25), 2009, pp 312 - 315, https://doi.org/10.2352/ISSN.2169-4451.2009.25.1.art00087_1