A method for spatially-selective etching of dielectric layers without the use of a mask has been developed at the University of New South Wales (UNSW). This ‘direct etching’ method, which was first implemented using inkjet printing, is now being further developed using Optomec's
Aerosol Jet Printer (AJP), in order to achieve the patterning resolution and processing throughput required for commercial photovoltaic applications. Results presented in this paper show that the use of the AJP enables etched grooves as narrow as 15-20 μm. Grooves can be etched in ∼
75 nm layers of SiO2, SiN
John Rodriguez, Alison J. Lennon, Catherine Chan, Pei Lu, Yu Yao, Stuart R. Wenham, "Direct Etching - Targeting Commercial Photovoltaic Applications" in Proc. IS&T Int'l Conf. on Digital Printing Technologies and Digital Fabrication (NIP27), 2011, pp 662 - 665, https://doi.org/10.2352/ISSN.2169-4451.2011.27.1.art00066_2