Non-lithographic digital microfabrication processes are ideally suited for the rapid prototyping of microelectronic devices and other high fidelity micro-components. Laser Direct-Write is an example of digital microfabrication that offers unique advantages and capabilities. A key advantage of laser direct-write techniques is their compatibility with a wide range of materials, surface chemistries and surface morphologies. The Naval Research Laboratory has developed various laser-based forward transfer processes ranging from the non-phase transformative direct printing of complex suspensions or inks to the “lase-and-place” of entire semiconductor devices. These processes have been demonstrated in the fabrication of a wide variety of microelectronic elements such as interconnects, passives, antennas, sensors, power sources and embedded circuits. Recently, laser direct-write of thin film-like structures with excellent lateral resolution and thickness uniformity using metallic nano-inks has also been demonstrated. The high degree of control in size and shape achievable was applied to the digital microfabrication of 3-dimensional stacked assemblies and also MEMS-like structures. Overall, the application of laser-based direct-write techniques is well suited for the development, customization, modification, and repair of microelectronic components and systems. This paper will provide a brief introduction to laser direct-write and describe several examples of the types of structures and devices fabricated at NRL using laser-based digital microfabrication processes.
Alberto Piqué, Heungsoo Kim, Ray Auyeung, Jiwen Wang, Andrew Birnbaum, Scott Mathews, "Laser-Based Digital Microfabrication" in Proc. IS&T Int'l Conf. on Digital Printing Technologies and Digital Fabrication (NIP25), 2009, pp 394 - 397, https://doi.org/10.2352/ISSN.2169-4451.2009.25.1.art00108_1