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Volume: 24 | Article ID: art00075_1
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New Micro Fabrication Techniques Utilizing Electrostatic Inkjet Phenomena
  DOI :  10.2352/ISSN.2169-4451.2008.24.1.art00075_1  Published OnlineJanuary 2008
Abstract

Electrostatic inkjet phenomena took place when strong electric field was applied to water pin electrode. In this paper we developed two new micro fabrication techniques utilizing electrostatic ink jet phenomena. First technique is to thin a metal rod. The metal rod was set on a metal plate electrode. The diameter of the rod was controlled by the time of voltage application between the capillary tube and the metal rod. The other is to punch a hole in a metal thin sheet. A shin metal sheet was set on the metal plate electrode. When the formation and locus of droplets that contained commercial etching liquid was controlled, small hole was punctured on the shin sheet. Hole diameter, less than 10 μm to some 100 μm was controlled by the voltage application between the sheet electrode and the capillary tube that was filled with the etching liquid.

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Shinjiro Umezu, Kazutoshi Katahira, Hitoshi Ohmori, "New Micro Fabrication Techniques Utilizing Electrostatic Inkjet Phenomenain Proc. IS&T Int'l Conf. on Digital Printing Technologies and Digital Fabrication (NIP24),  2008,  pp 287 - 290,  https://doi.org/10.2352/ISSN.2169-4451.2008.24.1.art00075_1

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