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Volume: 23 | Article ID: art00070_1
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MEMS-Based Inkjet Drop Generators from Plastic Substrates
Kathleen M. Vaeth
Deborah DeMejo
Emmanuel Dokyi
Mark Evans
Joseph Jech
Maria Lehmann
Robert Link
John Sechrist
  DOI :  10.2352/ISSN.2169-4451.2007.23.1.art00070_1  Published Online :  January 2007
Abstract

We report fabrication of a functional inkjet drop generator from plastic substrates exclusively using MEMS-based processing steps. Polyimide and poly(ethylene naphthalate) sheets laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600 npi array as small as 2.4 pL in volume (16.5 μm in diameter) at drop velocities of 15.5 m/s is realized with these devices.

Journal Title : NIP & Digital Fabrication Conference
Publisher Name : Society of Imaging Science and Technology
Publisher Location : 7003 Kilworth Lane, Springfield, VA 22151, USA
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 DOI 10.2352/ISSN.2169-4451.2007.23.1.art00070_1
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Kathleen M. Vaeth, Deborah DeMejo, Emmanuel Dokyi, Mark Evans, Joseph Jech, Maria Lehmann, Robert Link, John Sechrist, "MEMS-Based Inkjet Drop Generators from Plastic Substrates"  in Proc. IS&T Int'l Conf. on Digital Printing Technologies and Digital Fabrication (NIP23),  2007,  pp 297 - 301,  https://doi.org/10.2352/ISSN.2169-4451.2007.23.1.art00070_1

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Copyright © Society for Imaging Science and Technology 2007
72010410
NIP & Digital Fabrication Conference
nip digi fabric conf
2169-4451
Society of Imaging Science and Technology
7003 Kilworth Lane, Springfield, VA 22151, USA
2169-4451(20070101)2007:1L.297;1-
nip_v2007n1/splitsection70.xml
/ist/nipdf/2007/00002007/00000001/art00070
Articles
MEMS-Based Inkjet Drop Generators from Plastic Substrates
VaethKathleen M.
DeMejoDeborah
DokyiEmmanuel
EvansMark
JechJoseph
LehmannMaria
LinkRobert
SechristJohn
01012007
2007
1
297
301
2007
We report fabrication of a functional inkjet drop generator from plastic substrates exclusively using MEMS-based processing steps. Polyimide and poly(ethylene naphthalate) sheets laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600 npi array as small as 2.4 pL in volume (16.5 μm in diameter) at drop velocities of 15.5 m/s is realized with these devices.