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Volume: 22 | Article ID: art00050_3
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Laser Direct Writing and Precision Pattern Alignment
  DOI :  10.2352/ISSN.2169-4451.2006.22.2.art00050_3  Published OnlineJanuary 2006
Abstract

There are many ways of using lasers to direct write or create an image of functional electronic material. However, one of the challenges of making electronic devices on flexible substrates is how to align one pattern with another pattern on a substrate which is dimensionally non uniform. We have developed a process that uses the initial pattern as an encoder for the subsequent pattern utilizing a unique algorithm called nDSE (nanometer Displacement Sensing and Estimation). We will show example of using this process in conjunction with laser delamination of thin metal from plastic substrate

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Ron Hellekson, Cary Addington, Chuck Metge, Carl Picciotto, Jun Gao, "Laser Direct Writing and Precision Pattern Alignmentin Proc. IS&T Digital Fabrication Conf.,  2006,  pp 163 - 166,  https://doi.org/10.2352/ISSN.2169-4451.2006.22.2.art00050_3

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