Piezoelectric ink jet micropump devices offer the capability to precisely deposit fluids within microscopic structures. Manufacturers of flat panel displays, using light emitting polymers, have employed piezoelectric ink jet micropumps in their fabrication process to accurately and consistently place fluids within the pixel structure of displays. As an integral tool in this manufacturing process, the piezoelectric ink jet micropump must maintain tolerances necessary for adequate fluid placement in the display pixels and provide jetting operability for reliable functioning with a robustness to attain sufficient life. An industry push to increase display pixel resolution, demand for improved jetability of complex fluids, and the requirement for longer ink jet micropump service life has mandated the advancement of new technologies to meet these demands. State-of-the-art MEMS techniques have been developed to fabricate high quality silicon nozzles for these demanding applications. This paper describes how new silicon nozzle technology has been applied to a piezoelectric ink jet micropump to improve drop placement accuracy, jetting operability, and chemical resistance.