The advent of new solution based organic and inorganic/organic hybrid semiconductor material along with a desire for less expensive ways to produce large area electronic devices has stimulated research into non-conventional circuit patterning methods. We report on an inkjet based printing system which was constructed to facilitate the production of etch masks and electronic devices for large area applications such as displays and x-ray sensors. A multi-ejector wax print head was integrated for high accuracy, high throughput printing of etch masks and material exclusion zones in the processing of amorphous silicon and organic electronics circuitry. The same system also utilizes specialized single ejector print heads to deposit a wide variety of organic electronic materials for rapid turn experimentation required for materials and process development. Feature sizes down to 20μm and control of feature placement below 5μm are achieved. System design and capability will be discussed in the context of the resolution, throughput, material requirements and electronic device performance.
Steven Ready, William Wong, Kateri Paul, Bob Street, "Jet Printing for Large Area Electronics" in Proc. IS&T Int'l Conf. on Digital Printing Technologies (NIP18), 2002, pp 429 - 432, https://doi.org/10.2352/ISSN.2169-4451.2002.18.1.art00002_2