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Volume: 32 | Article ID: art00004
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Planar microlenses for near infrared CMOS image sensors
L. Dilhan
J. Vaillant
A. Ostrovsky
L. Masarotto
C. Pichard
R. Paquet
  DOI :  10.2352/ISSN.2470-1173.2020.7.ISS-144  Published Online :  January 2020
Abstract

In this paper we present planar microlenses designed to improve the sensitivity of SPAD pixels. We designed diffractive and metasurface planar microlens structures based on rigorous optical simulations. The current melted microlens solution and designed diffractive microlens were implemented on STMicroelectronics 40nm CMOS testchips (32 × 32 SPAD array), and average gains of 1.9 and 1.4 in sensitivity respectively were measured, compared to a SPAD without microlens.

Journal Title : Electronic Imaging
Publisher Name : Society for Imaging Science and Technology
Publisher Location : 7003 Kilworth Lane, Springfield, VA 22151 USA
Subject Areas :
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 DOI 10.2352/ISSN.2470-1173.2020.7.ISS-144
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L. Dilhan, J. Vaillant, A. Ostrovsky, L. Masarotto, C. Pichard, R. Paquet, "Planar microlenses for near infrared CMOS image sensors"  in Proc. IS&T Int’l. Symp. on Electronic Imaging: Imaging Sensors and Systems,  2020,  pp 144-1 - 144-7,  https://doi.org/10.2352/ISSN.2470-1173.2020.7.ISS-144

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Copyright © Society for Imaging Science and Technology 2020
72010604
Electronic Imaging
2470-1173
Society for Imaging Science and Technology
7003 Kilworth Lane, Springfield, VA 22151 USA
10.2352/ISSN.2470-1173.2020.7.ISS-144
2470-1173(20200126)2020:7L.1441;1-
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Articles
Planar microlenses for near infrared CMOS image sensors
DilhanL.
VaillantJ.
OstrovskyA.
MasarottoL.
PichardC.
PaquetR.
26012020
2020
7
144-1
144-7
2020
In this paper we present planar microlenses designed to improve the sensitivity of SPAD pixels. We designed diffractive and metasurface planar microlens structures based on rigorous optical simulations. The current melted microlens solution and designed diffractive microlens were implemented on STMicroelectronics 40nm CMOS testchips (32 × 32 SPAD array), and average gains of 1.9 and 1.4 in sensitivity respectively were measured, compared to a SPAD without microlens.
microlensfresnel zone platemetasurfaceSPADsingle photon avalanche diodecmos image sensors