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Volume: 32 | Article ID: art00004
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Planar microlenses for near infrared CMOS image sensors
  DOI :  10.2352/ISSN.2470-1173.2020.7.ISS-144  Published OnlineJanuary 2020
Abstract

In this paper we present planar microlenses designed to improve the sensitivity of SPAD pixels. We designed diffractive and metasurface planar microlens structures based on rigorous optical simulations. The current melted microlens solution and designed diffractive microlens were implemented on STMicroelectronics 40nm CMOS testchips (32 × 32 SPAD array), and average gains of 1.9 and 1.4 in sensitivity respectively were measured, compared to a SPAD without microlens.

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L. Dilhan, J. Vaillant, A. Ostrovsky, L. Masarotto, C. Pichard, R. Paquet, "Planar microlenses for near infrared CMOS image sensorsin Proc. IS&T Int’l. Symp. on Electronic Imaging: Imaging Sensors and Systems,  2020,  pp 144-1 - 144-7,  https://doi.org/10.2352/ISSN.2470-1173.2020.7.ISS-144

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