<?xml version="1.0"?>
<!DOCTYPE article PUBLIC "-//NLM//DTD Journal Publishing DTD v2.1 20050630//EN" "http://uploads.ingentaconnect.com/docs/dtd/ingenta-journalpublishing.dtd">
<article article-type="research-article">
  <front>
    <journal-meta>
      <journal-id journal-id-type="aggregator">72010410</journal-id>
      <journal-title>NIP &amp; Digital Fabrication Conference</journal-title>
      <abbrev-journal-title>nip digi fabric conf</abbrev-journal-title>
      <issn pub-type="ppub">2169-4451</issn><issn pub-type="epub"/>
      <publisher>
        <publisher-name>Society of Imaging Science and Technology</publisher-name>
        <publisher-loc>7003 Kilworth Lane, Springfield, VA 22151, USA</publisher-loc>
      </publisher>
    </journal-meta>
    <article-meta><article-id pub-id-type="doi">10.2352/ISSN.2169-4451.2008.24.1.art00066_1</article-id>
      <article-id pub-id-type="sici">2169-4451(20080101)2008:1L.251;1-</article-id>
      <article-id pub-id-type="publisher-id">nip_v2008n1/splitsection66.xml</article-id>
      <article-id pub-id-type="other">/ist/nipdf/2008/00002008/00000001/art00066</article-id>
      <article-categories>
        <subj-group>
          <subject>Articles</subject>
        </subj-group>
      </article-categories>
      <title-group>
        <article-title>Inkjet Method for Direct Patterned Etching of Silicon Dioxide</article-title>
      </title-group>
      <contrib-group>
        <contrib>
          <name>
            <surname>Lennon</surname>
            <given-names>Alison</given-names>
          </name>
        </contrib>
        <contrib>
          <name>
            <surname>Utama</surname>
            <given-names>Roland</given-names>
          </name>
        </contrib>
        <contrib>
          <name>
            <surname>Ho-Baillie</surname>
            <given-names>Anita</given-names>
          </name>
        </contrib>
        <contrib>
          <name>
            <surname>Wenham</surname>
            <given-names>Stuart</given-names>
          </name>
        </contrib>
      </contrib-group>
      <pub-date>
        <day>01</day>
        <month>01</month>
        <year>2008</year>
      </pub-date>
      <volume>2008</volume>
      <issue>1</issue>
      <fpage>251</fpage>
      <lpage>255</lpage>
      <permissions>
        <copyright-year>2008</copyright-year>
      </permissions>
      <abstract>
        <p>An inkjet printing method for the direct patterned etching of silicon dioxide is described. The method uses an inkjet device to deposit a pattern of a solution containing an inactive etching component onto a water soluble surface layer formed over the silicon dioxide. The inactive component
 reacts with the surface layer, where it contacts, to form an active etchant which etches the silicon dioxide under the surface layer to form a pattern of openings. The method has been successfully used to etch a frontcontact finger and busbar pattern in a silicon dioxide antireflection layer
 of a silicon solar cell.</p>
      </abstract>
    </article-meta>
  </front>
</article>
