72010350

Color and Imaging Conference

color imaging conf

2166-9635

Society of Imaging Science and Technology

7003 Kilworth Lane, Springfield, VA 22151, USA

10.2352/CIC.1994.2.1.art00051

2166-9635(19940101)1994:1L.186;1-

cic_v1994n1/splitsection51.xml

/ist/cic/1994/00001994/00000001/art00051

Articles

Image Analysis Applied to Film Thickness Measurements with White Light Interferometry

Marklund

Olov

Gustafsson

Lennart

01 01 1994

1994 1 186 189

1994

White light interferometry yields good resolution in thin film thickness measurements. Hue value variations vs. film thickness variations are complex and furthermore dependent on the power spectrum of the light source.Absolute film thickness measurements is possible using white light interferometry.